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Khooshehmehri, Aylar, Eslami Majd, Abdollah, Arabsheybani, Elham. (1401). Thermo-elastic damping and anchor loss in the operational modes of a hemispherical shell resonator. فناوری آموزش, 12(2), 211-224. doi: 10.22061/jcarme.2022.8081.2075
Aylar Khooshehmehri; Abdollah Eslami Majd; Elham Arabsheybani. "Thermo-elastic damping and anchor loss in the operational modes of a hemispherical shell resonator". فناوری آموزش, 12, 2, 1401, 211-224. doi: 10.22061/jcarme.2022.8081.2075
Khooshehmehri, Aylar, Eslami Majd, Abdollah, Arabsheybani, Elham. (1401). 'Thermo-elastic damping and anchor loss in the operational modes of a hemispherical shell resonator', فناوری آموزش, 12(2), pp. 211-224. doi: 10.22061/jcarme.2022.8081.2075
Khooshehmehri, Aylar, Eslami Majd, Abdollah, Arabsheybani, Elham. Thermo-elastic damping and anchor loss in the operational modes of a hemispherical shell resonator. فناوری آموزش, 1401; 12(2): 211-224. doi: 10.22061/jcarme.2022.8081.2075

Thermo-elastic damping and anchor loss in the operational modes of a hemispherical shell resonator

Journal of Computational & Applied Research in Mechanical Engineering (JCARME)
مقاله 6، دوره 12، شماره 2 - شماره پیاپی 24، اردیبهشت 2023، صفحه 211-224    اصل مقاله (935.38 K)
نوع مقاله: Research Paper
شناسه دیجیتال (DOI): 10.22061/jcarme.2022.8081.2075
نویسندگان
Aylar Khooshehmehri1؛ Abdollah Eslami Majd* 1؛ Elham Arabsheybani2
1Faculty of Electrical and Computer Engineering, Malek-Ashtar University of Technology, Tehran, Iran
2Faculty of Electrical and Computer Engineering, Malek-Ashtar University of Technology, Iran.
تاریخ دریافت: 26 اردیبهشت 1400،  تاریخ بازنگری: 26 اردیبهشت 1401،  تاریخ پذیرش: 08 خرداد 1401 
چکیده
The hemispherical resonator gyro (HRG) is a type of precision inertial sensor that has the advantages of direct angle measurement and unlimited dynamic range. The overall accuracy of the HRG is due to the quality of its resonator shell, and improving the performance of resonators requires a proper understanding of the processes of energy damping in each resonance cycle, which has a significant impact on sensor performance. In this paper, in order to investigate the losses in the hemisphere shell resonator, first, the equations governing the shell are studied, and three-dimensional modeling is performed in COMSOL software. By performing mechanical simulations, the resonance modes and the natural frequency of the shell are investigated, and finally, the second and third resonance modes are selected as the optimal operating mode of the gyroscope. Also, by performing thermal simulations, the dominant energy damping processes, such as thermo-elastic damping and anchor loss were analyzed and simulated, and the effect of shell material on damping was investigated. Then the quality factor of the resonator was evaluated based on its geometry and material. In this way, according to the scope of work of the gyroscope, this process can be used to design the specifications of the shell to achieve a resonator with the desired quality factor.
کلیدواژه‌ها
Hemispherical resonator gyroscope (HRG)؛ Quality factor؛ Thermos-elastic damping؛ Anchor loss؛ Hemispherical shell resonator (HSR)
مراجع
[1] A. Vafanejad, Wineglass Mode Resonators, Their Applications and Study of Their Quality Factor, PhD thesis, University of Southern California, (2015).

[2] B. George "On the beats in the vibrations of a revolving cylinder or bell", Math. Proc. Cambridge Philos. Soc, Vol. 7, No. 24, pp. 101-111, (1890).

[3] DM. Rozelle, "The hemispherical resonator gyro: From wineglass to the planets." In Proc. 19th AAS/AIAA Space Flight Mechanics Meeting, pp. 1157-1178, (2009).

[4] IP. Prikhodko, AA. Trusov, and AM. Shkel, "Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing." Sens. Actuators, Vol. 201, No. 3, pp. 517-524, (2013).

[5] E C. Litty, LL. Gresham, PA. Toole, DA. Beisecker , "Hemispherical resonator gyro: an IRU for Cassini." In Cassini/Huygens: A Mission to the Saturnian Systems, International Society for Optics and Photonics, pp. 299-310, (1996).

[6] Y. Li, L. Bing, W. Xu, and W. Wenqi, "Quadrature control of hemispherical resonator gyro based on FPGA." 10th International Conference on Electronic Measurement & Instruments, IEEE, pp. 369-372, (2011).

[7] E. Jesper Eklund, Andrei M. Shkel, "Glass blowing on a wafer level", J. Microelectromech. Syst, Vol. 16, No. 2, pp.232-239, (2007).

[8] R. Lutwak, "Micro-technology for positioning, navigation, and timing towards PNT everywhere and always." International Symposium on Inertial Sensors and Systems, IEEE, pp. 1-4, (2014).

[9] MH. Asadian,Y. Wang; S. Askari, A. Shkel. "Controlled capacitive gaps for electrostatic actuation and tuning of 3D fused quartz micro wineglass resonator gyroscope." International Symposium on Inertial Sensors and Systems, IEEE, pp. 1-4. IEEE, (2017).

[10] D. Senkal, CR. Christopher, AA. Trusov, and AM. Shkel, "Titania silicate/fused quartz glassblowing for 3-D fabrication of low internal loss wineglass micro-structures." In Solid-State Sensors, Actuators, and Microsystems Workshop, pp. 267-270, (2012).

[11] D. Senkal, MJ. Ahamed, MH. Asadian Ardakani, S. Askari, and AM. Shkel, "Demonstration of 1 million $ q $-factor on microglassblown wineglass resonators with out-of-plane electrostatic transduction." J. Microelectromech. Syst, Vol. 24, No. 1, pp. 29-37, (2014).

[12] C. Jae Yoong, and Kh Najafi. "A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding." 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 821-824, IEEE, (2015).

[13] D. Senkal, M. J. Ahamed, S. Askari, and A. M. Shkel. "1 million Q-factor demonstrated on micro-glassblown fused silica wineglass resonators with out-of-plane electrostatic transduction." In Hilton Head Workshop, pp. 68-71. (2014).

[14] R. Sedaghati, and M. Mahmoudian. "Hemispherical Vibratory Gyroscope Performance Evaluation and Sensitivity Analysis with Capacitive Excitation."  J. Electr. Comput. Eng. Innovations, Vol. 7, No. 1, pp. 47-58, (2018).

[15] Z. Xu, G. Yi, H. Fang, Y. Cao, L. Hu, and G. Zhang. "Influence of elasticity modulus on the natural frequency in hemispherical resonator." DGON Inertial Sensors and Systems, IEEE, pp. 1-11, (2019).

[16] J. Zhang, J. Shang, B. Luo, and Z. Su, "Micro Fountain-Like Resonators." IEEE 69th Electronic Components and Technology Conference (ECTC), pp. 890-895, (2019).

[17] T. Nagourney, S. Singh, B. Shiari, J. Yoong Cho, and Kh.Najafi, "Fabrication of hemispherical fused silica micro-resonator with tailored stiffness and mass distribution." IEEE Micro Electro Mechanical Systems (MEMS), pp. 1000-1003, (2018).

[18] JY.Cho, J.Yan, J A. Gregory, H W. Eberhart, R L. Peterson, and Kh. Najafi, "3-dimensional blow torch-molding of fused silica microstructures." J. Microelectromech. Syst, Vol. 22, No.4, pp. 1276-12846, (2013).

[19] S. Singh, T. Nagourney, J. Yoong Cho, .Darvishian, Kh. Najafi, and B. Shiari, "Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes." IEEE/ION Position, Location and Navigation Symposium (PLANS), pp. 15-19, (2018).

[20] T. Nagourney, J. Cho, A. Darvishian, B. Shiari, and Kh. Najafi. "Micromachined high-Q fused silica bell resonator with complex profile curvature realized using 3D micro blowtorch molding." 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), IEEE, pp. 1311-1314, (2015).

[21] B. Luo, J.Shang, Z. Su, J. Zhang, and CP. Wong, "Height adjustment of 3-D axisymmetric microumbrella shells for tailoring wineglass frequency." IEEE Trans. Components, Hybrids Manuf. Technol., Vol. 9, No. 3, pp. 567-574, (2018).

[22] Z. Liu, W. Zhang, F. Cui, and J.Tang. "Three-dimensional micromachined diamond birdbath shell resonator on silicon substrate." Microsyst. Technol, Vol.26, No. 4, pp. 1293-1299, (2020).

[23] A. Darvishian, T. Nagourney, J. Yoong Cho, B. Shiari, and Kh.Najafi, "Thermoelastic dissipation in micromachined birdbath shell resonators."  J. Microelectromech. Syst, Vol. 26, No. 4, pp.758-772, (2017).

[24] JY. Cho, S. Singh, Jk. Woo, G. He, and Kh. Najafi, "0.00016 deg/√ hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2 MQ and 1-cm Precision Shell Integrating (PSI) Gyroscope." IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), pp. 1-4, (2020).

[25] MJ. Ahamed, D. Senkal, and AM. Shkel, "Effect of annealing on mechanical quality factor of fused quartz hemispherical resonator." International Symposium on Inertial Sensors and Systems (ISISS), pp. 1-4, (2014).

[26] MM. Torunbalci, S. Dai, A. Bhat, and SA. Bhave, "Acceleration insensitive hemispherical shell resonators using pop-up rings." IEEE Micro Electro Mechanical Systems (MEMS), pp. 956-959, (2018).

[27] D. Senkal, Micro-glassblowing Paradigm for Realization of Rate Integrating Gyroscopes, PhD thesis, UC Irvine, (2015).

[28] CL. Mayberry, Interface circuits for readout and control of a micro-hemispherical resonating gyroscope, PhD thesis, Georgia Institute of Technology, (2014).

[29] P. Shao, Microscale hemispherical shell resonating gyroscopes, PhD thesis, Georgia Institute of Technology, (2014).

[30] M. Sharma, Design and Modeling of Advanced Gyroscopes, Master thesis, the University of British Columbia (2006).

[31] A. Darvishian, B. Shiari, J. Y. Cho, T. Nagourney, and K. Najafi, “Anchor Loss in Hemispherical Shell Resonators,” J. Microelectromech. Syst, Vol. 26, No. 1, pp. 51–66, (2017).

 

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