Fabrication of Micro Glass Spherical Resonator by Chemical Foaming Process (CFP)

Kookhaee, M.; Khooshehmehri, A.; Eslami Majd, A.

doi:10.22061/jecei.2022.8737.549

تعداد نشریات	11
تعداد شماره‌ها	237
تعداد مقالات	2,398
تعداد مشاهده مقاله	3,830,613
تعداد دریافت فایل اصل مقاله	2,775,225

	Fabrication of Micro Glass Spherical Resonator by Chemical Foaming Process (CFP)
Journal of Electrical and Computer Engineering Innovations (JECEI)
مقاله 26، دوره 11، شماره 1، فروردین 2023، صفحه 65-74 اصل مقاله (753.71 K)
نوع مقاله: Original Research Paper
شناسه دیجیتال (DOI): 10.22061/jecei.2022.8737.549
نویسندگان
M. Kookhaee؛ A. Khooshehmehri؛ A. Eslami Majd^*
Department of Electrical Engineering, Faculty of Electronic and Computer Engineering, Malek Ashtar University of Technology, Tehran, Iran.
تاریخ دریافت: 15 دی 1400، تاریخ بازنگری: 06 اردیبهشت 1401، تاریخ پذیرش: 17 اردیبهشت 1401
چکیده
Background and Objectives: The Hemispherical Resonator Gyroscope (HRG) is an inertial sensor that is a good choice for space missions and inertial navigation due to their low noise, low energy consumption, long life, and excellent accuracy and sensitivity. It consists of three main parts: the shell, the excitation and detection system, and the control circuits. In recent years, with using MEMS technology in the construction of HRG, vibrating shells with low volume and low price are made. Methods: The hemispherical shell is the main part and the beating heart of hemispherical resonator gyroscopes and is responsible for sensing. An optimized shell is required to implement the excitation and detection system and operate the gyroscope properly. In this research, the structure of a spherical shell with an environmental base that does not need to release the shell from its environment for its excitation and detection system is selected and the relationships governing this type of shell to improve the parameters of the glass blowing method will be investigated. Also, all sub-processes of this type method of fabrication to optimize the glass-blown spherical shell are implemented. Results: The process of making spherical shell by glass blowing using the chemical foaming process is used to obtain shells with height to radius ratio greater than 1, and finally, a glass shell with an etched cavity with a radius of 562 μm and depth of 524 μm created by the CNC process, with height to radius ratio of approximately 1.8 Has been achieved. In this method, using direct transfer of calcium carbonate to the etched cavity, before anodic bonding, the glass shell volume has been increased from 0.602 nL to 1.04 nL. Conclusion: The result is that to achieve a glass shell with a height to radius ratio of more than 1, in addition to improving the fabrication process, it is necessary to transfer the solid foaming agent to the etched cavity. Finally, in the fabrication of the glass-blown spherical shell, we have used the chemical foaming process (CFP) to obtain shells with a height to radius ratio greater than 1.
کلیدواژه‌ها
Hemispherical Resonator Gyroscope؛ the Etched Cavity in the Silicon Substrate؛ Anodic Bonding؛ Glass Blowing؛ Height to Radius Ratio of the Shell

مراجع
[1] J. Lee, S. Yun, J. Rhim, "Design and verification of a digital controller for a 2-Piece hemispherical resonator gyroscope," Sensors, 16(4): 555, 2016. [2] A. M. Shkel, "Type I and type II micromachined vibratory gyroscopes," in Proc. IEEE/ION PLANS 2006: 586-593, 2006. [3] Z. Xu, G. Yi, M. Er, C. Huang, "Effect of uneven electrostatic forces on the dynamic characteristics of capacitive hemispherical resonator gyroscopes," Sensors, 19(6): 1291, 2019. [4] A. A. Trusov, M. R. Phillips, G. H. Mccammon, D. M. Rozelle, A. D. Meyer, "Continuously self-calibrating CVG system using hemispherical resonator gyroscopes," in Proc. 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS): 1-4, 2015. [5] A. Heidari, M. L. Chan, H. A. Yang, G. Jaramillo, P. Taheri-Tehrani, P. Fonda, H. Najar, K. Yamazaki, L. Lin, D. A. Horsley, "Hemispherical wineglass resonators fabricated from the microcrystalline diamond," J. Micromech. Microeng., 23(12): 125016, 2013. [6] Z. Xu, G. Yi, H. Fang, Y. Cao, L. Hu, G. Zhang, "Influence of elasticity modulus on the natural frequency in hemispherical resonator," in Proc. 2019 IEEE DGON Inertial Sensors and Systems (ISS): 1-11, 2019. [7] B. Luo, M. A. Zhang, C. Lu, J. Shang, "Wafer-level fabrication of silicon-in-glass electrodes for electrostatic transduction," in Proc. 2016 IEEE 66th Electronic Components and Technology Conference (ECTC): 1278-1283, 2016. [8] J. J. Bernstein, M. G. Bancu, J. M. Bauer, E. H. Cook, P. Kumar, E. Newton, T. Nyinjee, G. E. Perlin, J. A. Ricker, W. A. Teynor, M. S. Weinberg, "High Q diamond hemispherical resonators: fabrication and energy loss mechanisms," J. Micromech. Microeng., 25(8): 085006, 2015. [9] J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi, "High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding," in Proc. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS): 177-180, 2013. [10] D. Senkal, "Micro-glassblowing Paradigm for Realization of Rate Integrating Gyroscopes," PhD Thesis University of California, Irvine, 2015. [11] P. Taheri-Tehrani, T. Su, A. Heidari, G. Jaramillo, C. Yang, S. Akhbari, H. Najar, S. Nitzan, D. Saito, L. Lin, D.A. Horsley, "Micro-scale diamond hemispherical resonator gyroscope," in Proc. Hilton Head Workshop: 289-292, 2014. [12] J. Y. Cho, K. Najafi, "A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding," in Proc. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): 821-824, 2015. [13] W. Li, Z. Hou, Y. Shi, K. Lu, X. Xi, Y. Wu, X. Wu, D. Xiao, "Application of micro-blowtorching process with whirling platform for enhancing frequency symmetry of microshell structure," J. Micromech. Microeng., 28(11): 115004, 2018. [14] Y. Shi, X. Xi, Y. Wu, W. Li, K. Lu, Z. Hou, X. Wu, D. Xiao, "Wafer-level fabrication process for micro hemispherical resonators," in Proc. 2019 IEEE 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): 1670-1673, 2019. [15] D. Senkal, M. J. Ahamed, M. H. Asadian Ardakani, S. Askari, A. M. Shkel, "Demonstration of 1 million q-factor on microglassblown wineglass resonators with out-of-plane electrostatic transduction," J. Microelectromech. Syst., 24(1): 29-37, 2015. [16] J. Giner, A. M. Shkel, "The concept of "collapsed electrodes" for glassblown spherical resonators demonstrating 200: 1 aspect ratio gap definition," in Proc. 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS): 1-4, 2015. [17] I. P. Prikhodko, S. A. Zotov, A. A. Trusov, A. M. Shkel, "Microscale glass-blown three-dimensional spherical shell resonators," J. Microelectromech. Syst., 20(3): 691-701, 2011. [18] R. Wang, B. Bai, H. Feng, Z. Ren, H. Cao, C. Xue, B. Zhang, J. Liu, "Design and fabrication of micro hemispheric shell resonator with annular electrodes," Sensors, 16(12): 1991, 2016. [19] J. Xie, L. Chen, H. Xie, J. Zhou, G. Liu, "The application of chemical foaming method in the fabrication of micro glass hemisphere resonator," Micromachines, 9(2): 42, 2018. [20] J. Shang, B. Chen, W. Lin, C.P. Wong, D. Zhang, C. Xu, J. Liu, Q. A. Huang, "Preparation of wafer-level glass cavities by a low-cost chemical foaming process (CFP)," Lab on a Chip, 11(8): 1532-1540, 2011. [21] B. Luo, J. Shang, Y. Zhang, "Hemipherical wineglass shells fabricated by a Chemical foaming process," in Proc. 2015 IEEE 16th International Conference on Electronic Packaging Technology (ICEPT): 951-954, 2015. [22] A. Darvishian, B. Shiari, J. Y. Cho, T. Nagourney, K. Najafi, "Anchor loss in hemispherical shell resonators" J. Microelectromech. Syst., 26(1): 51-66, 2017. [23] G. S. May, S. M. Sze, Fundamentals of Semiconductor Fabrication, USA: Hoboken, John Wiley & Sons, 2004. [24] A. C. Lapadatu, H. Jakobsen, Handbook of Silicon Based MEMS Materials and Technologies (Second Edition), Chapter 30, Anodic Bonding (pp. 599-610) Elsevier BV, 2015. [25] R. Barker, "The reversibility of the reaction CaCO3⇄ CaO+ CO2" J. Appl. Chem. Biotechnol., 23(10): 733-742, 1973. [26] J. Wei, H. Xie, M. L. Nai, C. K. Wong, L. C. Lee, "Low temperature wafer anodic bonding" J. Micromech. Microeng., 13(2): 217-222, 2003. [27] C. Zhang, A. Cocking, E. Freeman, Z. Liu, S. Tadigadapa, "On-Chip glass microspherical shell whispering gallery mode resonators," Sci. Rep., 7(1): 14965, 2017. [28] J. Giner, L. Valdevit, A. M. Shkel, "Glass-blown pyrex resonator with compensating Ti coating for reduction of TCF," in Proc. 2014 IEEE International Symposium on Inertial Sensors and Systems (ISISS): 1-4, 2014. [29] E. J. Eklund, A. M. Shkel, "Glass blowing on a wafer level," J. Microelectromech. Syst., 16(2): 232-239, 2007. [30] A. Khooshehmehri, A. Eslami Majd, S. A. Hosseini, "Design and fabrication of hemispherical shell resonator by glass blowing method," J. Electr. Comput. Eng. Innovations, 10(1): 37-46, 2022.
آمار تعداد مشاهده مقاله: 799 تعداد دریافت فایل اصل مقاله: 644

سامانه مدیریت نشریات علمی. طراحی و پیاده سازی از سیناوب

پیوندهای مفید

آمار

Fabrication of Micro Glass Spherical Resonator by Chemical Foaming Process (CFP)