Design and Fabrication of Hemispherical Shell Resonator by Glass Blowing Method

Khooshehmehri, A.; Eslami Majd, A.; Hosseini, S. A.

doi:10.22061/jecei.2021.7759.429

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	Design and Fabrication of Hemispherical Shell Resonator by Glass Blowing Method
Journal of Electrical and Computer Engineering Innovations (JECEI)
مقاله 4، دوره 10، شماره 1، فروردین 2022، صفحه 37-46 اصل مقاله (1.15 M)
نوع مقاله: Original Research Paper
شناسه دیجیتال (DOI): 10.22061/jecei.2021.7759.429
نویسندگان
A. Khooshehmehri^* ؛ A. Eslami Majd؛ S. A. Hosseini
Faculty of Electrical and Computer, Malek-Ashtar University of Technology, Tehran, Iran.
تاریخ دریافت: 14 دی 1399، تاریخ بازنگری: 26 اسفند 1399، تاریخ پذیرش: 04 اردیبهشت 1400
چکیده
Background and Objectives: The Hemispherical Resonator Gyroscope (HRG) has been a valuable choice for the aerospace industry due to its low noise, good performance, and long lifetime. Its main part consists of a hemispherical shell resonator (HSR). Recently, with the idea of using MEMS technology and using materials such as Pyrex in the construction of HSR, a significant reduction in the size, weight, and power consumption of this gyroscope along with the special gyroscopic characteristics of HRG, Today, the Micro-HRG has been introduced as a sensor in the strategic class. Methods: Micro-HSR can be implemented in three ways: micromachining, blowtorching, and glass blowing. In this paper, after a brief introduction and comparison of possible approaches to make an HSR, the glass blowing method is selected and the sub-processes of this method are introduced and the results of its implementation are presented. Results: The proposed sensor is made by performing the glass blowing method, with a radius of 1.536 mm, a middle base radius of 252 µm, and a shell height of 355 µm. Also, the most important fabrication parameters for achieving the desired geometrical shell were as follows: The appropriate initial thickness of Pyrex is 200 µm and the depth of the cavity under the silicon layer is 532 µm. The bonding process to create a stable connection between Si and Pyrex must be performed at a voltage of 800 V at a temperature of 550 °C for the 30s. And the blowing process with a heating rate of 4 °C/s and a cooling rate of 9.5 °C/s has been evaluated as a suitable thermal profile. By optimally controlling the temperature process in the blowing sub-process, the crystallization phenomenon is prevented, which will lead to the improvement of the HSR quality factor. Conclusion: Achieving the technology of making this hemispherical glass shell in sub-millimeter dimensions, which plays the role of the resonator in an HRG, due to the superior features of this gyroscope such as low noise, good performance, and long lifetime and its application in strategic industries, like navigation and smart weapons, it is of particular importance.
کلیدواژه‌ها
Hemispherical Resonator gyroscope؛ Hemispherical Shell Resonator؛ Glass blowing method؛ MEMS technology؛ Crystallization

مراجع
[1] A.M. Shkel, “Type I and type II micromachined vibratory gyroscopes,” in Proc. IEEE/ION PLANS 2006: 586–593, 2006. [2] R. Sedaghati, M. Mahmoudian, “Hemispherical vibratory gyroscope performance evaluation and sensitivity analysis with capacitive excitation,” J. Electr. Comput. Eng. Innovations, 7(1): 45-56, 2019. [3] L. Yun, L. Bing, W. Xu, W. Wenqi, “Quadrature control of hemispherical resonator gyro based on FPGA,” in Proc. IEEE 2011 10th International Conference on Electronic Measurement & Instruments, 3: 369–372, 2011. [4] D.M. Rozelle, “The hemispherical resonator gyro: From wineglass to the planets,” in Proc. 19th AAS/AIAA Space Flight Mechanics Meeting, 134: 1157–1178, 2009. [5] D. Senkal, A.M. Shkel, Whole-Angle MEMS Gyroscopes: Challenges and Opportunities. John Wiley & Sons, 2020. [6] E.C. Litty, L.L. Gresham, P.A. Toole, D.A. Beisecker, “Hemispherical resonator gyro: an IRU for Cassini,” in Proc. Cassini/Huygens: A Mission to the Saturnian Systems, 2803: 299–310, 1996. [7] D. Meyer, D. Rozelle, “Milli-HRG inertial navigation system,” Gyroscopy Navig., 3(4): 227–234, 2012. [8] D. Senkal, M. J. Ahamed, A. A. Trusov, A.M. Shkel, “Achieving sub-Hz frequency symmetry in micro-glassblown wineglass resonators,” J. Microelectromechanical Syst., 23(1): 30–38, 2013. [9] L. Zeng et al., “A 5.86 million quality factor cylindrical resonator with improved structural design based on thermoelastic dissipation analysis,” Sensors, 20(21): 6003, 2020. [10] G.H. Bryan et al., “On the beats in the vibrations of a revolving cylinder or bell,” in Proc. the Cambridge Philosophical Society, 7(24): 101–111, 1890. [11] Y. Huo, S. Ren, Z. Wei, G. Yi, “Standing wave binding of hemispherical resonator containing first--third harmonics of mass imperfection under linear vibration excitation,” Sensors, 20(19): 5454, 2020. [12] A.V. Vafanejad, “Wineglass mode resonators, their applications and study of their quality factor,” University of Southern California, 2015. [13] A. Darvishian, B. Shiari, J.Y. Cho, T. Nagourney, K. Najafi, “Anchor loss in hemispherical shell resonators,” J. Microelectromechanical Syst., 26(1): 51–66, 2017. [14] E.J. Eklund, A.M. Shkel, “Glass blowing on a wafer level,” J. Microelectromechanical Syst., 16(2): 232–239, 2007. [15] R. Lutwak, “Micro-technology for positioning, navigation, and timing towards PNT everywhere and always,” in Proc. 2014 International Symposium on Inertial Sensors and Systems (ISISS): 1–4, 2014. [16] M.H. Asadian, Y. Wang, S. Askari, A. Shkel, “Controlled capacitive gaps for electrostatic actuation and tuning of 3D fused quartz micro wineglass resonator gyroscope,” in Proc. 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL): 1–4, 2017. [17] J.Y. Cho, S. Singh, J.-K. Woo, G. He, K. Najafi, “0.00016 deg/√ hr Angle Random Walk (ARW) and 0.0014 deg/hr Bias Instability (BI) from a 5.2 MQ and 1-cm Precision Shell Integrating (PSI) Gyroscope,” in Proc. 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL): 1–4, 2020. [18] D. Senkal, M.J. Ahamed, A.A. Trusov, A.M. Shkel, “High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG,” Sensors Actuators A Phys., 201: 525–531, 2013. [19] D. Senkal, C. R. Raum, A.A. Trusov, A.M. Shkel, “Titania silicate/fused quartz glassblowing for 3-D fabrication of low internal loss wineglass micro-structures,” in Proc. Solid-State Sensors, Actuators, and Microsystems Workshop 2012: 267–270, 2012. [20] J. Cho, J. Yan, J.A. Gregory, H. Eberhart, R.L. Peterson, K. Najafi, “High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding,” in Proc. 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS): 177–180, 2013. [21] B. Li, X. Xi, K. Lu, Y. Shi, D. Xiao, X. Wu, “Frequency split suppression of fused silica micro shell resonator based on rotating forming process,” Microsyst. Technol.: 1–11, 2020. [22] A. Darvishian, T. Nagourney, J.Y. Cho, B. Shiari, K. Najafi, “Thermoelastic dissipation in micromachined birdbath shell resonators,” J. Microelectromechanical Syst., 26(4): 758–772, 2017. [23] A. Heidari et al., “Micromachined polycrystalline diamond hemispherical shell resonators,” in Proc. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII): 2415–2418, 2013. [24] D. Senkal, M.J. Ahamed, A.M. Shkel, “Design and modeling of micro-glassblown inverted-wineglass structures,” in Proc. 2014 International Symposium on Inertial Sensors and Systems (ISISS): 1–4, 2014. [25] J.Y. Cho, K. Najafi, “A high-q all-fused silica solid-stem wineglass hemispherical resonator formed using micro blow torching and welding,” in Proc. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): 821–824, 2015. [26] J.Y. Cho, J. Yan, J.A. Gregory, H.W. Eberhart, R.L. Peterson, K. Najafi, “3-dimensional blow torch-molding of fused silica microstructures,” J. Microelectromechanical Syst., 22(6): 1276–1284, 2013. [27] L. Sorenson, F. Ayazi, “Effect of structural anisotropy on anchor loss mismatch and predicted case drift in future micro-hemispherical resonator gyros,” in Proc.IEEE/ION PLANS 2014: 493–498, 2014. [28] A. Vafanejad, E.S. Kim, “Sub-degree angle detection using dome--shaped diaphragm resonator with wine-glass mode vibration,” in Proc. Hilton Head: 391–394, 2014. [29] B. Luo, J. Shang, Z. Su, J. Zhang, C.-P. Wong, “Height adjustment of 3-D axisymmetric microumbrella shells for tailoring wineglass frequency,” IEEE Trans. Components, Packag. Manuf. Technol., 9(3): 567–574, 2018. [30] A. Matthews, “An operation and mechanization of the hemispherical resonator gyroscope,” in Proc. 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS): 7–14, 2018. [31] D. Senkal, “Micro-glassblowing Paradigm for Realization of Rate Integrating Gyroscopes,” UC Irvine, 2015. [32] B. Luo, J. Shang, Y. Zhang, “Hemispherical glass shell resonators fabricated using Chemical Foaming Process,” in Proc. 2015 IEEE 65th Electronic Components and Technology Conference (ECTC): 2217–2221, 2015. [33] R. Wang et al., “Design and fabrication of micro hemispheric shell resonator with annular electrodes,” Sensors, 16(12): 1991, 2016. [34] J. Giner, A.M. Shkel, “The concept of" collapsed electrodes" for glassblown spherical resonators demonstrating 200: 1 aspect ratio gap definition,” in Proc. 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS): 1–4, 2015. [35] D. Senkal, M.J. Ahamed, S. Askari, A. M. Shkel, “1 million Q-factor demonstrated on micro-glassblown fused silica wineglass resonators with out-of-plane electrostatic transduction,” in Proc. Hilton Head Workshop: 68–71, 2014. [36] M. Kanik et al., “Metallic glass hemispherical shell resonators,” J. Microelectromechanical Syst., 24(1): 19–28, 2014. [37] Z. Su, J. Shang, B. Luo, C.-P. Wong, “Study on an Improved Wafer Level Fabrication Process to Achieve Size Uniformity for Micro Glass Shell Resonators,” in Proc. 2018 IEEE 68th Electronic Components and Technology Conference (ECTC): 962–966, 2018. [38] W. Li et al., “Application of micro-blowtorching process with whirling platform for enhancing frequency symmetry of microshell structure,” J. Micromechanics Microengineering, 28(11): 115004, 2018. [39] Y. Shi et al., “Wafer-level fabrication process for micro hemispherical resonators,” in Proc. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): 1670–1673, 2019. [40] P. Pai, F.K. Chowdhury, C.H. Mastrangelo, M. Tabib-Azar, “MEMS-based hemispherical resonator gyroscopes,” in Proc. SENSORS IEEE, 2012: 1–4, 2012. [41] P. Taheri-Tehrani et al., “Micro-scale diamond hemispherical resonator gyroscope,” in Proc. Hilton Head Workshop: 289–292, 2014. [42] J.J. Bernstein et al., “High Q diamond hemispherical resonators: fabrication and energy loss mechanisms,” J. Micromech. Microeng., 25(8): 85006, 2015. [43] L.D. Sorenson, X. Gao, F. Ayazi, “3-D micromachined hemispherical shell resonators with integrated capacitive transducers,” in Proc. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS): 168–171, 2012.
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Design and Fabrication of Hemispherical Shell Resonator by Glass Blowing Method